Oxford Instruments installs its 200 mm ALD passivation tool at a UK-based microLED microdisplay developer

UK-based Oxford Instruments Plasma Technology announced that it has installed one of its 200 mm atomic layer deposition (ALD) passivation systems at a UK microLED provider, in order to support the customer's latest AR microdisplay development and production. The OIPT system is used to deposit high-K dielectric ultra-thin films for high-density, very high-brightness, low-power and high frame-rate RGB pixel arrays.

OIPT says that its low-damage plasma ALD technology is optimized for smaller dies with smaller active areas, and was shown in some cases by its customers at ICNS to double external quantum efficiency. 


In the past, OIPT revealed that its systems were supplied to both ITRI, Taiwan and VueReal, Canada. There are not many UK-based microLED microdisplay developers - so the customer is likely to be Porotech, Plessey or EpiPix.

Posted: Jan 24,2024 by Ron Mertens