Oxford Instruments Plasma Technology
Oxford Instruments Plasma Technology (OIPT), part of the Oxford Instruments group, is a provider of dry etching and deposition solutions for Micro and Nanofabrication, based on the company's plasma, ion beam, etch and atomic layer deposition (ALD) technologies.
OIPT is actively involved in MicroLED development, supplying solutions to key players such as ITRI, Taiwan and VueReal, Canada. The solutions address the demanding requirements for mini and MicroLED fabrication. Products range from clustered cassette-to-cassette platforms for high-throughput production processing to compact stand-alone systems for R&D.
Contact information for Oxford Instruments Plasma Technology
North End Yatton
Bristol
BS49 4AP
United Kingdom
Oxford Instruments installs its 200 mm ALD passivation tool at a UK-based microLED microdisplay developer
UK-based Oxford Instruments Plasma Technology announced that it has installed one of its 200 mm atomic layer deposition (ALD) passivation systems at a UK microLED provider, in order to support the customer's latest AR microdisplay development and production. The OIPT system is used to deposit high-K dielectric ultra-thin films for high-density, very high-brightness, low-power and high frame-rate RGB pixel arrays.
OIPT says that its low-damage plasma ALD technology is optimized for smaller dies with smaller active areas, and was shown in some cases by its customers at ICNS to double external quantum efficiency.
OIPT to supply several etch and deposition systems to support ITRI's micro-LED R&D program
UK-based plasma etch and deposition processing system maker Oxford Instruments Plasma Technology (OIPT) announced that it has sold several PlasmaPro 100 systems, including both etch and deposition systems, to ITRI for its micro-LED R&D program.
Taiwan's ITRI (Industrial Technology Research Institute) is reportedly developing Micro-LED technologies for both small-size (microdisplays) and large-size (130-inch and larger) applications.
