MicroLED equipment makers

Germany-based 3D-Micromac AG develops and markets laser micromachining and roll-to-roll laser systems. 3D-Micromac systems and services have been successfully implemented in various high-tech industries worldwide. This includes semiconductor, photovoltaic, glass and display industry, electronics, as well as medical device technology.

For microLED display manufacturing, 3D-Micromac offers industrial laser solutions for mass production:

• Laser-Induced Forward Transfer (LIFT) which enables the transfer of hundreds of millions of microLEDs without having to apply mechanical forces
• Laser Lift-Off (LLO) which guarantees a highly uniform, force-free lift-off of different layers on wafer and panel substrates
• REPAIR: Single die repair process at every step of the microLED production process

Advanced Micro-Fabrication Equipment (AMEC) is a China-based global semiconductor microfabrication equipment company. AMEC specializes in equipment used to develop and produce micro-sized and nanoscale-sized VLSIs, focusing on chemical vapor deposition and plasma etching products.

In 2018 AMEC announced it will setup an R&D and production facility in Nanchang, that will apply MOCVD technology for power devices, deep ultraviolet devices and micro LEDs.

Aixtron AG is a provider of deposition equipment to the semiconductor industry. The company's technology solutions are used by a diverse range of customers world wide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials.

Aixtron's AIX G5+ is an MOCVD system used to create micro-LEDs, providing on-wafer uniformity control, low particle levels and unique advanced features for demanding micro LED requirements. In 2022, the company said it is starting to receive orders for its microLED production tools. In late 2024, Aixtron commented that it is highly positive on the microLED industry, as it expects large tool orders in 2026.

ASM Pacific Technology (ASMPT), established in 1975 and based in Hong Kong, offers assembly equipment, packaging equipment, surface mount technology equipment, and other equipment types for semiconductor and optoelectronics processes.

For MicroLED production, the company offers transfer equipment based on the company's patented soldering tip technology, in addition to epiwafer deposition equipment and more.

BE Semiconductor Industries (Besi) develops assembly processes and equipment for leadframe, substrate and wafer level packaging applications in a wide range of end-user markets.

For the MicroLED market, Besi offers transfer and assembly equipment.

BluGlass was established in 2005 to commercialize semiconductor processes and equipment for the manufacture of high efficiency devices. BluGlass' proprietary Remote Plasma Chemical Vapour Deposition (RPCVD) is used to produce LED and power electronic devices in a cost-effective way.

In 2018 BluGlass signed a collaboration agreement with a microLED company to investigate the use of its RPCVD process for MicroLED production. In 2019 it was revealed that BluGlass's first partner is X-Celeprint.

BluGlass is a public company trading on the Australian Stock Exchange (ASX: BLG).

Taiwan-based Bolite Optoelectronics provides highly customizable laser solutions. Bolite is a system integrator of solid-state, fiber, or diode laser technologies, including dual- and multi-wavelength lasers.

Bolite manufactures laser micromachining equipment that can process a wide range of materials with feature size as fine as 1 micron. For the mini-LED and micro-LED markets, the company offers laser lift-off, laser trimming and repair, photoluminescence inspection, laser bonding, laser annealing, and micro laser marking.

Korea-based Charm Engineering is engaged in the manufacture of equipment for the display and semiconductor industries.

Charm Engineering developed equipment to repair microLEDs, using laser to fine-process materials at the micro-size level and can repair both chip and circuit board defects.

In collaboration with Korea's Photonics Technology Institute (KOPTI), Charm Engineering developed TFT array defective wiring repair equipment for micro-LED and supplied several systems to Micro-LED developers.

Us-based CyberOptics Corporation develops high-precision 3D sensing technology solutions. The company's tools are used for inspection and metrology in the semiconductor and Surface Mount Technology (SMT) markets.

For the microLED market, CyberOptics offers its Multi-Reflection Suppression (MRS)-enabled SQ3000 Multi-Function systems for Automated Optical Inspection (AOI), Solder Paste Inspection (SPI) and Coordinate Measurements (CMM). In 2022 CyberOptics was acquired by Nordson Corporation.