Researchers develop a femtosecond-laser based method of fine QD deposition for microLED color conversion display production
Researchers from the Beijing Institute of Technology developed a spatially shaped femtosecond-laser method for fabricating ultrafine quantum-dot pixels, that can be placed on top of microLEDs, for color-conversion display production. The method combines high-precision laser drilling with selective quantum-dot filling.
The process that the researchers developed starts with a glass substrate coated with a thin SU-8 polymer layer. A femtosecond laser was then used to drill ordered micro-hole arrays into the polymer. It is reported that the spatially shaped Bessel beam produced holes with clear entrances, smooth sidewalls, and low taper, with limited damage to the underlying glass. The holes can be as small as 100 nm.


