UK-based plasma etch and deposition processing system maker Oxford Instruments Plasma Technology (OIPT) announced that it has sold several PlasmaPro 100 systems, including both etch and deposition systems, to ITRI for its micro-LED R&D program.

OIPT PlasmaPro 100 photo

Taiwan's ITRI (Industrial Technology Research Institute) is reportedly developing Micro-LED technologies for both small-size (microdisplays) and large-size (130-inch and larger) applications.

At the end of 2017 it was reported that Taiwan's Electronic and Optoelectronic System Research Laboratories (EOSRL, part of ITRI) has started to develop micro-LEDs, and it is building a production line for both types of displays (small-sized and large-sized).

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