Ennostar qualified Veeco's LUMINA+ MOCVD system for microLED production

Veeco announced that Ennostar has accepted and qualified Veeco's LUMINA+ MOCVD system by Ennostar Corp of Hsinchu, Taiwan (a provider of integrated optoelectronic solutions, specializing in R&D and manufacturing III-V materials).

Veeco Propel GaN MOCVD system photo

Veeco says that this order sets a new benchmark for high-volume arsenide and phosphide (As/P) production, for microLED devices production.

 

Veeco further says that this new platform combines proven TurboDisc technology with what is claimed to be breakthrough productivity.

The evaluation process started in late 2025, and this demonstrates "unprecedented speed of product qualification and capacity scalability". Ennostar will deploy the tool in high-volume production of high-end optoelectronic devices. With what is said to be the largest-capacity reactor in the industry, and high throughput, the system is engineered to meet customers’ stringent performance requirements with improved process efficiency.

Posted: Jun 11,2026 by Ron Mertens